Semiconductor device internally having insulated gate bipolar transistor

ABSTRACT

The semiconductor device includes a P-type semiconductor region and an MOS transistor. MOS transistor includes a gate electrode, a collector electrode, a drain electrode, an N-type impurity region and a P-type impurity region. N-type impurity region is electrically connected to the drain electrode. P-type impurity region is electrically connected to the collector electrode. P-type impurity region is electrically connected to the drain electrode. The semiconductor device further includes an N-type impurity region and an electrode. N-type impurity region is electrically connected to the gate electrode. The electrode is formed on the P-type semiconductor region with an insulating film therebetween, and is electrically connected to gate electrode. Thereby, an element footprint can be reduced while maintaining characteristics.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The invention relates to a semiconductor device, and particularly to asemiconductor device having a P-channel MOS transistor (insulated gatefield-effect transistor) arranged for improving turn-off characteristicsof an IGBT (Insulated Gate Bipolar Transistor). More particularly, theinvention relates to a structure of the semiconductor device internallyhaving the IGBT.

2. Description of the Background Art

The IGBT (Insulated Gate Bipolar Transistor) has been known as a powerdevice handling a large electric power. The IGBT can operate as anequivalent circuit controlling the base current of the bipolartransistor by an MOS transistor. The IGBT has both a feature ofimplementing fast switching characteristics of the MOS transistor and afeature of implementing high-voltage/large-current processing capabilityof the bipolar transistor.

In the IGBT, a low on-state voltage and a low switching loss arerequired for reducing a power loss. Generally, in a turn-on operation ofthe IGBT, holes of minority carriers are injected from a P-typecollector layer into an N-type base layer (drift layer), and aresistance of the drift layer lowers due to a conductivity modulation ofan N-drift layer. When the resistance of the N-drift layer (drift layer)lowers, many electrons are injected from an emitter layer to the N-driftlayer and the IGBT rapidly changes to the on state.

In the on state, a collector-emitter voltage (on-state voltage) issubstantially applied to this N-type base layer. For reducing thison-state voltage, a majority carrier current in the drift layer may beincreased to lower a resistance value of the drift layer. In a turn-offoperation, however, excessive carriers in the drift layer must beentirely discharged externally from the IGBT or must be removed byrecoupling between the electrons and holes. Therefore, when manyexcessive carriers are present, a current will flow until the carriersare discharged so that the turn-off loss increases.

Japanese Patent Laying-Open Nos. 2003-158269 and 2005-109394 havedisclosed structures that reduce the turn-off loss of the IGBT andrapidly turn off it.

In Japanese Patent Laying-Open No. 2003-158269, an insulated gatecontrol electrode is arranged on a surface of a drift layer of an IGBT.In a turn-off operation of the IGBT, a potential of this insulated gatecontrol electrode is adjusted to absorb holes produced in the driftlayer and thereby to suppress occurrence of a tail current in theturn-off operation.

In the insulated gate control electrode disclosed in Japanese PatentLaying-Open No. 2003-158269, the gate insulating film has a thickness,e.g., of 5 nm-30 nm and the holes are forcedly pulled out by making useof a tunneling phenomenon or an avalanche phenomenon.

In the structure disclosed in Japanese Patent Laying-Open No.2005-109394, a P-channel MOS transistor (insulated gate field-effecttransistor) is arranged between a collector electrode node and a base ofa bipolar transistor. An N-channel MOS transistor for controlling a basecurrent of the bipolar transistor is arranged in series with thisP-channel MOS transistor.

The P-channel MOS transistor is kept off during the operation (on state)of the IGBT. In the turn-off operation, the P-channel MOS transistor isset to the on state so that a hole current flowing into the bipolartransistor from the collector electrode may bypass it. This preventsinjection of the holes into the base layer from the collector electrodein the turn-off operation, and residual carriers (holes) are rapidlydischarged from the drift layer (base layer) of the bipolar transistorso that the switching loss is reduced. Thereby, the low switching lossand the fast operation in the turn-off operation are achieved, andfurther the low on-state voltage of the IGBT can be maintained.

In the structure disclosed in Japanese Patent Laying-Open No.2005-109394, the gate insulating film of the P-channel MOS transistorhas a thickness that ensures a gate breakdown voltage equal to or largerthan, e.g., an element breakdown voltage of the field insulating film orthe like so that the breakdown voltage in the off state may be ensured.

In Japanese Patent Laying-Open No. 2003-158269, the insulated gatecontrol electrode arranged at the surface of the drift layer (baselayer) is used for discharging the holes in the turn-off operation,using the tunneling phenomenon or the avalanche phenomenon. In thiscase, a high voltage is applied to the insulating film of 5 nm to 30 nmin thickness located under the control electrode, and this results in aproblem that the breakdown characteristics of this insulating film areliable to deteriorate.

In the structure disclosed in Japanese Patent Laying-Open No.2003-158269, the insulated gate control electrode is arrangedindependently of the control electrode (the gate of the MOS transistor)controlling the turn-on and turn-off of the IGBT. This results in aproblem that the timing of the turn-on/turn-off of the IGBT and thetiming of the voltage application to the insulated gate controlelectrode cannot be adjusted without difficulty.

In the structure disclosed in Japanese Patent Laying-Open No.2005-109394, the gate electrode of the P-channel MOS transistor is fixedto the ground level, or the gate voltages of both the P- and N-channelMOS transistors are controlled according to the output signal of thesame control circuit.

While the IGBT is off, the P-channel MOS transistor is kept on. In thiscase, the gate electrode of the P-channel MOS transistor carries avoltage similar to that on the emitter electrode. Therefore, when theP-channel MOS transistor is on, it carries a high voltage similar to acollector-emitter voltage Vce. Therefore, the P-channel MOS transistorhas the thick gate insulating film of a thickness larger than, e.g.,that of the field insulating film for ensuring the breakdown voltage.Consequently, this P-channel MOS transistor has a larger height thanN-channel MOS transistors around it, resulting in a problem that a largestep or difference in level occurs in the IGBT. Since the P-channel MOStransistor receives the high voltage, a sufficient distance must be keptfrom the surrounding impurity regions for ensuring the insulation withrespect to the impurity regions, which results in undesired increase ofthe footprint of the element.

SUMMARY OF THE INVENTION

An object of the invention is to provide a semiconductor device that canreduce a footprint of an element while maintaining a low on-resistance,a low switching loss and intended breakdown characteristics of an IGBT.

Another object of the invention is to provide a semiconductor devicethat can reduce an element footprint while maintaining intendedcharacteristics.

A semiconductor device according to an aspect of the invention includesa semiconductor substrate, a first semiconductor region of a firstconductivity type formed in the semiconductor substrate, and an MOStransistor of the first conductivity type formed at a surface of thesemiconductor substrate. The MOS transistor of the first conductivitytype includes a gate electrode, a source electrode, a drain electrode, asecond semiconductor region of a second conductivity type, a thirdsemiconductor region of the first conductivity type and a fourthsemiconductor region of the first conductivity type. The secondsemiconductor region has a channel formed by a potential differencebetween the gate electrode and the source electrode, is formed in thefirst semiconductor region and is electrically connected to the drainelectrode. The third semiconductor region is formed in the secondsemiconductor region, and is electrically connected to the sourceelectrode. The fourth semiconductor region is formed in the secondsemiconductor region and is electrically connected to the drainelectrode. The semiconductor device further includes a fifthsemiconductor region of the second conductivity and an electrode. Thefifth semiconductor region is formed in the first semiconductor region,is opposed to the second semiconductor region with the firstsemiconductor region therebetween and is electrically connected to thegate electrode. The electrode is formed on the first semiconductorregion located between the second and fifth semiconductor regions withan insulating film therebetween, and is electrically connected to thegate electrode.

A semiconductor device according to another aspect of the inventionincludes a semiconductor substrate, a first semiconductor region of afirst conductivity type formed in the semiconductor substrate, and anMOS transistor of the first conductivity type formed at a surface of thesemiconductor substrate. The MOS transistor of the first conductivitytype includes a gate electrode, a source electrode, a drain electrode, asecond semiconductor region of a second conductivity type, a thirdsemiconductor region of the first conductivity type and a fourthsemiconductor region of the first conductivity type. The secondsemiconductor region has a channel formed by a potential differencebetween the gate electrode and the source electrode, is formed in thefirst semiconductor region and is electrically connected to the drainelectrode. The third semiconductor region is formed in the secondsemiconductor region, and is electrically connected to the sourceelectrode. The fourth semiconductor region is formed in the secondsemiconductor region and is electrically connected to the drainelectrode. The semiconductor device further includes a fifthsemiconductor region of the second conductivity. The fifth semiconductorregion is formed in the first semiconductor region, is opposed to thesecond semiconductor region with the first semiconductor regiontherebetween and is electrically connected to the gate electrode. Thefirst semiconductor region includes a heavily doped region formed at thesemiconductor substrate surface located between the second and fifthsemiconductor regions, and a lightly doped region containing impuritiesof the first conductivity type at a lower concentration than the heavilydoped region.

A semiconductor device according to still another aspect of theinvention includes a semiconductor substrate, a first semiconductorregion of a first conductivity type formed in the semiconductorsubstrate, and an MOS transistor of the first conductivity type formedat a surface of the semiconductor substrate. The MOS transistor of thefirst conductivity type includes a gate electrode, a source electrode, adrain electrode, a second semiconductor region of a second conductivitytype, a third semiconductor region of the first conductivity type and afourth semiconductor region of the first conductivity type. The secondsemiconductor region has a channel formed by a potential differencebetween the gate electrode and the source electrode, is formed in thefirst semiconductor region and is electrically connected to the drainelectrode. The third semiconductor region is formed in the secondsemiconductor region, and is electrically connected to the sourceelectrode. The fourth semiconductor region is formed in the secondsemiconductor region and is electrically connected to the drainelectrode. The semiconductor device further includes a fifthsemiconductor region of the second conductivity. The fifth semiconductorregion is formed in the first semiconductor region, is opposed to thesecond semiconductor region with the first semiconductor regiontherebetween and is electrically connected to the gate electrode. Thefirst semiconductor region includes a heavily doped region formed at thesemiconductor substrate surface located between the second and fifthsemiconductor regions, and a lightly doped region containing impuritiesof the first conductivity type at a lower concentration than the heavilydoped region. Each of the second and fifth semiconductor regions isformed by implanting the impurities, and a diffusion depth of the fifthsemiconductor region is smaller than a diffusion depth of the secondsemiconductor region.

A semiconductor device according to yet another aspect of the inventionincludes a semiconductor substrate, a first semiconductor region of afirst conductivity type formed in the semiconductor substrate, and anMOS transistor of the first conductivity type formed at a surface of thesemiconductor substrate. The MOS transistor of the first conductivitytype includes a gate electrode, a source electrode, a drain electrode, asecond semiconductor region of a second conductivity type, a thirdsemiconductor region of the first conductivity type and a fourthsemiconductor region of the first conductivity type. The secondsemiconductor region has a channel formed by a potential differencebetween the gate electrode and the source electrode, is formed in thefirst semiconductor region and is electrically connected to the drainelectrode. The third semiconductor region is formed in the secondsemiconductor region, and is electrically connected to the sourceelectrode. The fourth semiconductor region is formed in the secondsemiconductor region and is electrically connected to the drainelectrode. The semiconductor device further includes a fifthsemiconductor region of the second conductivity and an insulating film.The fifth semiconductor region is formed in the semiconductor substrateand is electrically connected to the gate electrode> The insulating filmis formed in the first semiconductor region, and isolates the second andfifth semiconductor regions from each other.

The semiconductor device according to the invention can reduce afootprint of an element while maintaining a low on-resistance, a lowswitching loss and intended breakdown characteristics of an IGBT. Also,the semiconductor device can reduce an element footprint whilemaintaining the intended characteristics.

The foregoing and other objects, features, aspects and advantages of thepresent invention will become more apparent from the following detaileddescription of the present invention when taken in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an electrically equivalent circuit of a semiconductordevice according to a first embodiment of the invention.

FIG. 2 schematically shows parasitic components of the semiconductordevice according to the first embodiment of the invention.

FIG. 3 schematically shows a sectional structure of the semiconductordevice according to the first embodiment of the invention.

FIG. 4 schematically shows a state of extension of a depletion layer inthe case where an electrode 27 is not formed in the structure shown inFIG. 3, and particularly shows, on an enlarged scale, a portionindicated by B in FIG. 3.

FIG. 5 schematically shows the state of extension of the depletion layerin the structure shown in FIG. 5, and particularly shows, on an enlargedscale, the portion indicated by B in FIG. 3.

FIGS. 6 to 12 schematically shows sectional structures of semiconductordevices according to second to eighth embodiments of the invention,respectively.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the invention will now be described with reference to thedrawings. In the drawings, a region indicated by “P-” has a P-typeconductivity, and has a P-type impurity concentration lower than that ofa region indicated by “P”. Likewise, a region indicated by “N-” has anN-type conductivity, and has an N-type impurity concentration lower thanthat of a region indicated by “N”. Further, the region indicated by “P⁺”has a P-type conductivity, and has a P-type impurity concentrationhigher than that of a region indicated by “P”.

First Embodiment

In FIG. 1, a semiconductor device includes a PNP bipolar transistor(bipolar transistor) BT, an N-channel MOS transistor (MOS transistor ofa second conductivity type) NQ controlling a base current of bipolartransistor BT, a P-channel MOS transistor (MOS transistor of a firstconductivity type) PQ interrupting carrier injection when bipolartransistor BT is turned off, and a PN junction diode Di.

Bipolar transistor BT has an emitter (first conduction node) connectedto a collector electrode node 3 and a collector (second conduction node)connected to an emitter electrode node 4. MOS transistor NQ is connectedbetween emitter electrode node 4 and a base electrode node 5 of bipolartransistor BT. More specifically, MOS transistor NQ has a source coupledto emitter electrode node 4, a drain connected to base electrode node 5of bipolar transistor BT and a gate electrode node 7 receiving a controlsignal Vg1. MOS transistor NQ has a back gate (substrate) and a sourcecoupled together. MOS transistor NQ selectively becomes electricallyconductive between emitter electrode node 4 and base electrode node 5 ofthe bipolar transistor according to control signal Vg1. When it becomesconductive, MOS transistor NQ electrically connects emitter electrodenode 4 and base electrode node 5 of the bipolar transistor together.

MOS transistor PQ has a source connected to collector electrode node 3,and has a substrate and a drain that are connected to base electrodenode 5 of bipolar transistor BT. A circuit unit 2 formed of bipolartransistor BT and MOS transistor NQ corresponds to an electricallyequivalent circuit of an ordinary IGBT. In the following description,the “IGBT” refers to a unit represented by this block 2.

The semiconductor device shown in FIG. 1 further includes PN junctiondiode Di connected between a gate electrode node 6 of MOS transistor PQand emitter electrode node 4. This diode Di has a cathode electricallyconnected to gate electrode node 6 of MOS transistor PQ and an anodeelectrically connected to emitter electrode node 4. Diode Di relievesthe voltage applied to the gate insulating film of MOS transistor PQwhen MOS transistor PQ is off.

In the state discussed below, an inductive load LL is connected tocollector electrode node 3 of the semiconductor device as shown in FIG.2. Inductive load LL is connected between a power supply node supplyinga high-side voltage Vh and collector electrode node 3. A gatecapacitance Cg is present between gate electrode node 6 of MOStransistor PQ and collector electrode node 3. Also, a junctioncapacitance Cd provided by a PN junction is present in diode Di.

In the structure shown in FIG. 2, when IGBT 2 is turned on, a component(L·(di/dt)) of inductive load LL acts to apply a majority of high-sidevoltage Vh to inductive load LL, and a collector potential Vc ofcollector electrode node 3 rapidly lowers. When IGBT 2 is turned off,collector potential Vc of collector electrode node 3 attainssubstantially the same level as high-side voltage Vh. It is now assumedthat MOS transistor PQ has a threshold voltage of an absolute value Vthp(which will be simply referred to as a “threshold voltage Vthp”hereinafter). Also, an emitter potential Ve of emitter electrode node 4is set to a lowest level among those of voltages that are usuallyapplied to the semiconductor device.

In the following description, a “conductive state” and a “nonconductivestate” represent the same means as the “on state” and the “off state”,respectively. Particularly, the “conductive state” and the“nonconductive state” are used for enhancing the presence and absence ofthe current, respectively.

In a turn-on operation of IGBT 2, a voltage of control signal Vg1applied to gate electrode node 7 of MOS transistor NQ attains theH-level to turn on MOS transistor NQ. Thereby, bipolar transistor BT issupplied with a base current and attains the conductive state so thatIGBT 2 is turned on. When IGBT 2 is turned on, a potential Vg2 of gateelectrode node 6 of MOS transistor PQ lowers with lowering of collectorpotential Vc of collector electrode node 3, and particularly lowersaccording to capacitance values of capacitances Cg and Cd. When gatepotential Vg2 of gate electrode node 6 attains a level of emitterpotential Ve of emitter electrode node 4, a forward bias operation ofdiode Di suppresses potential lowering of gate potential Vg2 of gateelectrode node 6, and diode Di clamps the lowest potential of gatepotential Vg2.

In the turn-on operation of IGBT 2, when a difference (Vc−Vg2) betweencollector potential Vc of collector electrode node 3 and gate potentialVg2 of gate electrode node 6 becomes equal to or lower than thresholdvoltage Vthp of MOS transistor PQ (i.e., Vc−Vg2<Vthp), MOS transistor PQis turned off. In the turn-on operation, therefore, an operation ofrestricting the hole injection into PNP bipolar transistor BT is notperformed.

In the turn-off operation of IGBT 2, the voltage of control signal Vg1applied to gate electrode node 7 of MOS transistor NQ is set to, e.g., 0V, and MOS transistor NQ is turned off. Thereby, the supply of the basecurrent to bipolar transistor BT stops, and bipolar transistor BTchanges to the off state. Collector potential Vc of collector electrodenode 3 rises in response to this change of bipolar transistor BT to theoff state. Parasitic capacitances Cg and Cd raise gate potential Vg2 inresponse to the rising of collector potential Vc.

In the turn-off operation of IGBT 2, when a difference (Vc−Vg2) betweencollector potential Vc and gate potential Vg2 exceeds the thresholdvoltage of MOS transistor PQ, MOS transistor PQ is turned on toshort-circuit the emitter region and base region (base electrode node 5)of bipolar transistor BT. Thereby, MOS transistor PQ discharges thecurrent flowing from collector electrode node 3, and the supply of holesto bipolar transistor BT is interrupted.

In the turn-off operation, since the supply of holes to the emitterregion of bipolar transistor BT is interrupted, collector potential Vcof collector electrode node 3 rapidly rises when the discharging ofcarriers from the base region of bipolar transistor BT is completed.Thereby, the period for which a tail current flows can be short, and aswitching loss at the time of the turn-off can be reduced so that thefast operation can be implemented. In the on state (conductive state) ofIGBT 2, collector-emitter voltage Vce of bipolar transistor BT issufficiently low, and the on-state voltage can be low.

During a transition state, e.g., for turn-off, gate potential Vg2attains the voltage level that is determined by junction capacitance Cdof diode Di and gate capacitance Cg of MOS transistor PQ. Gate potentialVg2 is at the same voltage level as that between emitter potential Veand collector potential Vc.

When the turn-off state is attained and IGBT 2 is off (nonconductive),diode Di is in a reverse bias state. In this case, a leak current ofdiode Di and the like cause gate potential Vg2 to attain finally thesame level as emitter potential Ve. In the actual device structure,however, the current flowing between gate electrode node 6 and collectorelectrode node 3 as well as a balance between voltages that are placedon gate capacitance Cg and junction capacitance Cd, respectively, andanother factor substantially keep gate potential Vg2 in a stable voltage(e.g., a punch through voltage) balanced between emitter potential Veand collector potential Vc, as will be described below.

Therefore, gate potential Vg2 of gate electrode node 6 of MOS transistorPQ can be set to a voltage level higher than emitter potential Ve, andthe voltage applied to the gate insulating film of MOS transistor PQ canbe reduced so that the gate insulating film can be reduced in thickness.In the nonconductive state, the voltage applied to the gate insulatingfilm is low. Therefore, it is not necessary to keep a large distance toa peripheral region (the electrode layer and the like) for ensuring abreakdown voltage with respect to the peripheral region so that thefootprint of the element (cell) can be small.

Referring to FIG. 3, a P-type semiconductor substrate (firstsemiconductor region) 10 is formed in a semiconductor substrate SUB, andP-channel MOS transistor PQ is formed at a surface of semiconductorsubstrate SUB. N-type impurity regions (second and fifth semiconductorregions) 12 a and 12 b are formed in P-type semiconductor region 10 atthe surface of semiconductor substrate SUB. N-type impurity region 12 aat the surface of semiconductor substrate SUB neighbors to N-typeimpurity region 12 b with P-type semiconductor region 10 therebetween.

A P-type impurity region 13 surrounds a part (middle and left portion inFIG. 3) of N-type impurity region 12 a. In a plan layout (not shown) ofthis semiconductor device, the various regions are formed concentricallyaround an end L1 on the right side of FIG. 3. Therefore, P-type impurityregion 13 surrounds N-type impurity region 12 a in the structuredescribed below. P-type impurity region 13 has a function of dischargingthe holes to the emitter electrode node at the time of turn-off of theIGBT.

A P-type impurity region 14 is formed on P-type impurity region 13 andat a part of surface of N-type impurity region 12 a, and is internallyprovided with a heavily doped N-type impurity region 15. P-type impurityregion 14 surrounds N-type impurity region 15. An emitter electrode 16connected to emitter electrode node 4 is formed in contact with bothP-type impurity region 14 and N-type impurity region 15. Emitterelectrode 16 connects the back gate and source of MOS transistor NQshown in FIG. 1 together, and electrically connects them to emitterelectrode node 4.

An gate electrode 18 electrically connected to gate electrode node 7 isformed on the surface of P-type impurity region 14 with a gateinsulating film 17 therebetween. Gate insulating film 17 and gateelectrode 18 extend to a position above N-type impurity region 12 a, andform a channel at the surface of P-type impurity region 14 betweenN-type impurity regions 15 and 12 a.

P-type impurity regions (third and fourth semiconductor regions) 19 aand 19 b are formed within N-type impurity region 12 a at the surface ofsemiconductor substrate SUB. P-type impurity regions 19 a and 19 b arespaced from P-type impurity region 14, and are formed at the surface ofsemiconductor substrate SUB with N-type impurity region 12 a interposedbetween them. A gate electrode 21 is formed above N-type impurity region12 a located between P-type impurity regions 19 a and 19 b with a gateinsulation film 20 therebetween. Gate electrode 21 is electricallyconnected to gate electrode node 6 in FIG. 1. A collector electrode 23(a source electrode of an MOS transistor of a first conductivity type)is formed at the surface of P-type impurity region 19 a and is connectedto collector electrode node 3 shown in FIG. 1. P-type impurity region 19a is also connected electrically to collector electrode 23. An N-typeimpurity region 22 (second semiconductor region) neighbors to P-typeimpurity region 19 b, and a drain electrode 24 forming base electrodenode 5 shown in FIG. 1 is formed on both the surfaces of P- and N-typeimpurity regions 19 b and 22. Drain electrode 24 is electricallyconnected to P- and N-type impurity regions 19 b and 22.

A heavily doped N-type impurity region (fifth impurity region) 25 isformed at the surface of semiconductor substrate SUB in N-type impurityregion 12 b. An electrode 26 electrically connected to gate electrode 21is formed on the surface of N-type impurity region 25. Thereby, N-typeimpurity regions 12 b and 25 are electrically connected to gateelectrode 21. Electrode 26 corresponds to a cathode of diode Di shown inFIG. 1, and P-type semiconductor region 10 corresponds to an anodethereof. When diode Di is in the nonconductive state, punch throughoccurs in P-type semiconductor region 10 between N-type impurity regions12 a and 12 b (i.e., punch through breakdown occurs in the PN junction),and a punch through voltage restricts the voltage applied to gateelectrode 21.

Thus, when the voltage between N-type impurity region 12 a and P-typesemiconductor region 10 reaches the punch through voltage, a depletionlayer extends from a boundary between N- and P-type impurity regions 12a and 10 toward N-type impurity region 12 b, and comes into contact withthe depletion layer between N- and P-type impurity regions 12 b and 10so that a punch through breakdown occurs. This punch through breakdownestablishes an electric connection at the surface of P-typesemiconductor region 10 between N-type impurity regions 12 a and 12 bvia the depletion layer, and the voltage is transmitted from N-typeimpurity region 22 to gate electrode 21 via N-type impurity region 25and electrode 26 so that the lowering of gate potential Vg2 issuppressed. When gate potential Vg2 rises, the channel resistance of MOStransistor PQ increases, and the voltage level of N-type impurity region22 lowers so that the punch through breakdown no longer occurs in the PNjunction on the surface of P-type semiconductor region 10, and gatepotential Vg2 no longer rises. Thereby, the voltage level of gateelectrode 21 keeps the voltage level that is dependent on the punchthrough voltage and is higher than emitter potential Ve of emitterelectrode 16.

An electrode 27 (field plate) is formed on semiconductor substrate SUBimmediately above P-type semiconductor region 10 located between N-typeimpurity regions 12 a and 12 b with an insulating film 28 therebetween.Electrode 27 is electrically connected to gate electrode 21. Theopposite ends of each of electrode 27 and insulating film 28 areextended to positions immediately above N-type impurity regions 12 a and12 b, respectively.

In the structure shown in FIG. 3, N-channel MOS transistor NQ isbasically formed of P-type impurity region 14, N-type impurity region15, gate insulating film 17, gate electrode 18 and N-type impurityregion 12 a. The back gate of N-channel MOS transistor NQ is formed ofP-type impurity region 14, and the back gate and the source (N-typeimpurity region 15) thereof are electrically connected together byemitter electrode 16.

P-channel MOS transistor PQ is basically formed of P-type impurityregions 19 a and 19 b, N-type impurity region 12 a, a gate insulatingfilm 20 and gate electrode 21. N-type impurity region 12 a forming theback gate of P-channel MOS transistor PQ is coupled to drain electrode24 via N-type impurity region 22. This implements a structure in whichthe back gate and the drain of MOS transistor PQ are connected to drainelectrode 24 electrically connected to base electrode node 5.

Diode Di is basically formed of N-type impurity region 25, N-typeimpurity region 12 b, P-type semiconductor region 10 and P-type impurityregions 13 and 14. The capacitance of the PN junction between N-typeimpurity region 12 b and P-type semiconductor region 10 is used forlowering potential Vg2 of gate electrode node 6 by the capacitancedivision at the time of turn-off of the IGBT.

Bipolar transistor BT is basically formed of P-type impurity region 19a, N-type impurity region 12 a and P-type impurity regions 13 and 14.N-type impurity region 12 a functions as the base region of the bipolartransistor.

In the structure shown in FIG. 3 and particularly at the time of theturn-on of the IGBT, control signal Vg1 applied to gate electrode 18attains a positive voltage level, and a channel is formed at the surfaceof P-type impurity region 14 between N-type impurity regions 15 and 12 aso that electrons flow from emitter electrode 16 to N-type impurityregion 12 a. At this time, the holes flow from collector electrode 23through P-type impurity region 19 a into N-type impurity region 12 a.Thereby, conductivity modulation occurs in N-type impurity region 12 a,and the resistance value thereof lowers so that a larger current flowsthrough N-type impurity region 12 a. Thereby, the base current ofbipolar transistor BT increases, and bipolar transistor BT is turned on.Even when the potential of collector electrode 23 lowers at the time ofturn-on, the potential difference between P-type impurity region 19 aand gate electrode 21 is equal to or lower than threshold voltage Vthpof the P-channel MOS transistor, and the P-channel MOS transistor iskept off. Therefore, no adverse effect is exerted on the supply of holesfrom collector electrode 23 to N-type impurity region 12 a.

At the time of this turn-on, P-type impurity regions 19 a and 19 b aswell as N-type impurity region 22 keep the potential level equal to thatof N-type impurity region 12 a, and thus nearly equal to emitterpotential Ve. P-type semiconductor region 10 is at the level of emitterpotential Ve. The PN junction between N-type impurity region 12 b andP-type semiconductor region 10 is in the reverse bias state, and diodeDi is kept off.

At the time of turn-off of the IGBT, control signal Vg1 placed on gateelectrode 18 is set, e.g., to 0 V, and the channel (inversion layer) atthe surface of P-type impurity region 14 disappears. Thereby, thecurrent path to N-type impurity region 12 a is interrupted, and bipolartransistor BT changes to the turned-off state. When potential Vc ofcollector electrode 23 rises, the potential difference between P-typeimpurity region 19 a and gate electrode 21 exceeds threshold voltageVthp of MOS transistor PQ, and MOS transistor PQ is turned on. A channelis formed at the surface of N-type impurity region 12 a between P-typeimpurity regions 19 a and 19 b so that P-type impurity region 19 babsorbs the holes supplied from collector electrode 23 and the carriers(holes) remaining in N-type impurity region 12 a, and the supply of theholes to N-type impurity region 12 a is interrupted.

When the discharge of the residual carriers (holes) from N-type impurityregion 12 a is completed, the bipolar transistor is turned off, and theIGBT is turned off. In this off state, the PN junction between N-typeimpurity region 12 a and P-type semiconductor region 10 is in a reversebias state, and the depletion layer expands from P-type semiconductorregion 10 to N-type impurity region 12 a, and finally reaches thesurface of N-type impurity region 12 a. This relieves the electric fieldconcentration at the surface of N-type impurity region 12 a, andimplements the high-breakdown-voltage structure.

At the time of turn-off of the IGBT, the level of gate potential Vg2 ofgate electrode 21 is raised by the capacitive coupling via the gatecapacitance according to the rising of collector potential Vc. In thisoperation, the capacitive coupling by the capacitance of the PN junctionbetween N-type impurity region 12 b and P-type semiconductor region 10suppresses the rising of gate potential Vg2. When the voltage difference(Vc−Vg2) becomes equal to or lower than threshold voltage Vthp, achannel is formed under gate electrode 21, and P-type impurity regions19 a and 19 b and N-type impurity region 12 a connected via this channelattain the same potential so that the supply of the holes to N-typeimpurity region 12 a from collector electrode 23 is interrupted.

P-type impurity region 19 b, drain electrode 24 and N-type impurityregion 22 transmit collector potential Vc to N-type impurity region 12a. Thereby, the PN junction between N-type impurity region 12 a andP-type semiconductor region 10 enters a reverse bias state, and thepunch through breakdown occurs in the PN junction between N-typeimpurity regions 12 a and 12 b so that the punch through state occursbetween N-type impurity regions 12 a and 12 b. This punch throughvoltage suppresses the lowering of the potential level of gate potentialVg2, and gate potential Vg2 is kept at this voltage level.

Gate potential Vg2 of gate electrode 21 is at the level intermediatebetween emitter potential Ve and collector potential Vc. Therefore, thevoltage applied to gate insulating film 20, i.e., the difference betweenpotential Vc of collector electrode 23 and potential Vg2 of gateelectrode 21 is smaller than the collector-emitter voltage. Therefore,the film thickness of gate insulating film 20 can be small. Since it ispossible to relieve the voltage applied to gate insulating film 20, itis not necessary to employ a structure for ensuring the breakdownvoltage, e.g., by keeping a large distance between collector and gateelectrodes 23 and 21, or by keeping a large distance between gate anddrain electrodes 21 and 24 as well as a large distance between gate andcollector electrodes 21 and 23. Therefore, the whole footprint of thesemiconductor device can be small.

When the punch through occurs between N-type impurity regions 12 a and12 b according to the collector voltage applied from collector electrode23, the punch through voltage caused thereby suppresses the lowering ofgate potential Vg2. Therefore, the distance between N-type impurityregions 12 a and 12 b is set to an extent causing the punch through.

According to the first embodiment of the invention, as described above,the diode element is connected as the voltage relieving element betweenthe gate and emitter electrode nodes of the P-channel MOS transistoremployed for reducing the turn-off loss. This structure can relieve thevoltage that is applied to the gate insulating film at the time ofturn-off of the P-channel MOS transistor, without adversely affectingthe on and off operations of the P-channel MOS transistor. Thereby, thesemiconductor device can achieve a small footprint, a high-breakdownvoltage structure and a low loss.

Further, the first embodiment can reduce the element footprint whilemaintaining the punch through characteristics. This will be describedlater.

Referring to FIG. 4, as described above, when the IGBT is turned off,the PN junction between N-type impurity region 12 a and P-typesemiconductor region 10 enters the reverse bias state. Thereby, thedepletion layer is formed in the boundary between N-type impurity region12 a and P-type semiconductor region 10. The depletion layer extends inthe order of depletion layers 140 a, 140 b, 140 c and 140 d as thereverse bias between N-type impurity region 12 a and P-typesemiconductor region 10 increases. Finally, P-type semiconductor region10 between N-type impurity regions 12 a and 12 b is entirely depleted tocause punch through breakdown between N-type impurity regions 12 a and12 b. Accordingly, the punch through voltage between N-type impurityregions 12 a and 12 b depends on the distance between N-type impurityregions 12 a and 12 b, and this punch through voltage restricts themaximum value of gate potential Vg2 of MOS transistor PQ in the offstate. For effectively restricting the maximum value of gate potentialVg2 of MOS transistor PQ, therefore, it is necessary to increase adistance D1 between N-type impurity regions 12 a and 12 b, i.e.,distance D1 between the N-type semiconductor regions electricallyconnected to drain and gate electrodes 24 and 21, respectively. However,large distance D1 increases the footprint per semiconductor device, andthus degrades the effective on-resistance ((on-resistance)×(footprint))of the semiconductor device.

Referring to FIG. 5, in this embodiment, the electric field applied byelectrode 27 to the surface of semiconductor substrate SUB suppresses,at the surface of semiconductor substrate SUB, the extension of thedepletion layer at the boundary between N-type impurity region 12 a andP-type semiconductor region 10. Thus, the potential of electrode 27 issubstantially equal to gate potential Vg2, and is at the voltage levelbetween emitter potential Ve and collector potential Vc. When electrode27 having such a potential applies the electric field to the surface ofsemiconductor substrate SUB, the depletion layer at the boundary betweenN-type impurity region 12 a and P-type semiconductor region 10 extendsin the order of depletion layers 40 a, 40 b, 40 c and 40 d, as thereverse bias between N-type impurity region 12 a and P-typesemiconductor region 10 increases. The extension of depletion layers 40a-40 d are suppressed at the surface of semiconductor substrate SUB.Consequently, distance D1 can be reduced while maintaining the punchthrough voltage between N-type impurity regions 12 a and 12 b, and theelement footprint can be reduced while maintaining the characteristics.The effective on-resistance of the semiconductor device can be improved.

The semiconductor device of the invention is not restricted to have thestructure shown in FIG. 3, and is merely required to include at leastthe structure shown in a portion B of FIG. 3. The semiconductor deviceshown in the portion B of FIG. 3 includes semiconductor substrate SUB,P-type semiconductor region 10 formed in semiconductor substrate SUB andMOS transistor PQ formed at the surface of semiconductor substrate SUB.MOS transistor PQ includes gate electrode 21, collector electrode 23,drain electrode 24, N-type impurity region 12 a and P-type impurityregions 19 a and 19 b. N-type impurity region 12 a is provided with achannel formed by the potential difference between gate and collectorelectrodes 21 and 23, is formed in P-type semiconductor region 10 and iselectrically connected to drain electrode 24. P-type impurity region 19a is formed in N-type impurity region 12 a, and is electricallyconnected to collector electrode 23. P-type impurity region 19 b isformed in N-type impurity region 12 a, and is electrically connected todrain electrode 24. The semiconductor device further includes N-typeimpurity region 12 b and electrode 27. N-type impurity region 12 b isformed in P-type semiconductor region 10, is opposed to N-type impurityregion 12 a with P-type semiconductor region 10 therebetween and iselectrically connected to gate electrode 21. Electrode 27 is formed onP-type semiconductor region 10 located between N-type impurity regions12 a and 12 b with insulating film 28 therebetween, and is electricallyconnected to gate electrode 21.

Preferably, the semiconductor device according to the invention furtherincludes structures represented in portions other that the portion B ofFIG. 3, in addition to the structure represented in the portion B ofFIG. 3. In this case, the semiconductor device further includes bipolartransistor BT, MOS transistor NQ and diode Di. Bipolar transistor BTincludes an emitter electrically connected to collector electrode node 3of MOS transistor PQ, a collector connected to emitter electrode node 4and base electrode node 5 electrically connected to drain electrode 24of MOS transistor PQ. MOS transistor NQ is connected between emitterelectrode node 4 and base electrode node 5, and is selectively turned onaccording to control signal Vg1 to connect electrically emitterelectrode node 4 to base electrode node 5. Diode Di has a cathodeelectrically connected to gate electrode 21 of MOS transistor PQ and ananode electrically connected to emitter electrode node 4.

Second Embodiment

Referring to FIG. 6, the semiconductor device of this embodiment differsfrom the semiconductor device of the first embodiment shown in FIG. 3 inthat a P-type impurity region 30 is formed in place of electrode 27 andinsulating film 28 (FIG. 3). P-type impurity region 30 is formed inP-type semiconductor region 10 at the surface of semiconductor substrateSUB located between N-type impurity regions 12 a and 12 b. P-typeimpurity region 30 may be in contact with N-type impurity regions 12 aand 12 b, and may be isolated from N-type impurity regions 12 a and 12b.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the first embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

In the semiconductor device of this embodiment, P-type impurity region30 having a higher impurity concentration than P-type semiconductorregion 10 is formed at the surface of semiconductor substrate SUBlocated between N-type impurity regions 12 a and 12 b. Therefore, theextension of the depletion layer at the boundary between N- and P-typeimpurity regions 12 a and 30 is locally suppressed at the surface ofsemiconductor substrate SUB. Consequently, this embodiment can reducedistance D1 while maintaining the punch through voltage between N-typeimpurity regions 12 a and 12 b, and can reduce the element footprintwhile maintaining the characteristics. Consequently, this embodiment canachieve substantially the same effect as the first embodiment.

Third Embodiment

Referring to FIG. 7, the semiconductor device of this embodiment differsfrom the semiconductor device of the first embodiment shown in FIG. 3 inthat electrode 27, insulating film 28 and N-type impurity region 12 b(FIG. 3) are not formed. N-type impurity region 25 is opposed to N-typeimpurity region 12 a with P-type semiconductor region 10 therebetween.Consequently, N-type impurity region 25 operates to lower a contactresistance of electrode 26, and also forms a PN junction of diode Di(FIG. 1) between N- and P-type impurity regions 25 and 10. The punchthrough voltage depends on distance D1 between N-type impurity regions12 a and 25, i.e., distance D1 between the N-type semiconductor regionelectrically connected to drain electrode 24 and the N-typesemiconductor region electrically connected to gate electrode 21. BothN-type impurity regions 12 a and 25 are formed by doping withimpurities. A diffusion depth D2 of N-type impurity region 25 (i.e.,diffusion depth D2 of the N-type semiconductor region electricallyconnected to gate electrode 21) is smaller than a diffusion depth D3 ofN-type impurity region 12 a, i.e., diffusion depth D3 of the N-typesemiconductor region electrically connected to drain electrode 24.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the first embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

For example, when the semiconductor device includes N-type impurityregion 12 b as is done in the structure shown in FIG. 3, N-type impurityregions 12 a and 12 b are usually formed by implanting the N-typeimpurities, using one mask, for accurately controlling distance D1 (FIG.4) between N-type impurity regions 12 a and 12 b. Consequently, N-typeimpurity regions 12 a and 12 b in FIG. 3 have the same diffusion depth.Conversely, in the embodiment shown in FIG. 7, diffusion depth D2 isequal to the diffusion depth of N-type impurity region 25 so thatdiffusion depth D2 is smaller than diffusion depth D3 of N-type impurityregion 12 a. This structure having the small diffusion depth suppressesthe diffusion of the impurity region in the lateral direction in FIG. 3.Therefore, the footprint of the semiconductor device can be reducedcorresponding to the elimination of N-type impurity region 12 b.Consequently, the effect similar to that of the first embodiment can beachieved. Further, in a practical structure, already-existing N-typeimpurity region 25 is used as the PN junction of diode Di (FIG. 1),which results in a merit that the number of manufacturing steps does notincrease.

In the embodiment already discussed, N-type impurity region 25 has ahigher impurity concentration than N-type impurity region 12 a. However,the impurity concentration of N-type impurity region 25 is norparticularly restricted, and may be substantially equal to the impurityregion, e.g., of N-type impurity region 12 a.

Fourth Embodiment

Referring to FIG. 8, the semiconductor device of this embodiment differsfrom the semiconductor device of the third embodiment shown in FIG. 7 inthat P-type impurity region 30 is formed. P-type impurity region 30 isformed in P-type semiconductor region 10 at the surface of semiconductorsubstrate SUB. P-type impurity region 30 may be in contact with N-typeimpurity regions 12 a and 12 b, or may be isolated from N-type impurityregions 12 a and 12 b by P-type semiconductor region 10.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the third embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

The semiconductor device according to the embodiment can achievesubstantially the same effect as the third embodiment, and additionallycan locally suppress, at the surface of semiconductor substrate SUB, theextension of the depletion layer located at the boundary between N-typeimpurity region 12 a and P-type impurity region 30 because P-typeimpurity region 30 having a higher impurity concentration than P-typesemiconductor region 10 is formed at the surface of semiconductorsubstrate SUB. Consequently, this embodiment can further decreasedistance D1 while maintaining the punch through voltage between N-typeimpurity regions 12 a and 25, and can further reduce the elementfootprint while maintaining the characteristics.

Fifth Embodiment

Referring to FIG. 9, the semiconductor device of this embodiment differsfrom the semiconductor device of the third embodiment shown in FIG. 7 inthat N-type impurity regions 12 b and 31 are formed. N-type impurityregion 31 is in contact with N-type impurity region 12 a, and is opposedto N-type impurity region 12 b with P-type semiconductor region 10therebetween. N-type impurity region 12 b is formed in P-typesemiconductor region 10 to surround N-type impurity region 25, and formsthe PN junction of diode Di (FIG. 1) with respect to P-typesemiconductor region 10. Both N-type impurity regions 12 b and 31 areformed by implantation of impurities. Diffusion depths D4 and D2 ofrespective N-type impurity regions 31 and 12 b are smaller thandiffusion depth D3 of N-type impurity region 12 a. Particularly, N-typeimpurity regions 12 b and 31 may be formed in the same step. In thiscase, diffusion depths D2 and D4 are equal to each other as shown inFIG. 9, and distance D1 can be accurately defined by a mask that is usedfor forming N-type impurity regions 12 b and 31.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the third embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

The semiconductor device of this embodiment can achieve substantiallythe same effect as the third embodiment. Further, this embodiment cansuppress diffusion of the N-type semiconductor regions (N-type impurityregions 12 a, 22 and 31) electrically connected to drain electrode 24toward N-type impurity region 12 b because diffusion depth D4 of N-typeimpurity region 31 is smaller than diffusion depth D3 of N-type impurityregion 12 a. Therefore, this embodiment can reduce the footprint of theN-type semiconductor region electrically connected to drain electrode24, and can further reduce the footprint of the semiconductor device.

Sixth Embodiment

Referring to FIG. 10, the semiconductor device of this embodimentdiffers from the semiconductor device of the third embodiment shown inFIG. 7 in that N-type impurity region 22 (shallow region) protrudes intoP-type semiconductor region 10. N-type impurity region 22 is in contactwith N-type impurity region 12 a (deep region), and is opposed to N-typeimpurity region 25 with P-type semiconductor region 10 therebetween.Both impurity concentrations of N-type impurity regions 22 and 25 arehigher than that of N-type impurity region 12 a. Both N-type impurityregions 22 and 25 are formed by implanting the impurities. Diffusiondepths D4 and D2 of respective N-type impurity regions 22 and 25 aresmaller than diffusion depth D3 of N-type impurity region 12 a.Particularly, N-type impurity regions 22 and 25 may be formed in thesame step. In this case, diffusion depths D2 and D4 are equal to eachother as shown in FIG. 10, and distance D1 can be accurately defined bya mask that is used for forming N-type impurity regions 22 and 25.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the third embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

The semiconductor device of this embodiment can achieve substantiallythe same effect as the third embodiment. Further, this embodiment cansuppress diffusion of the N-type semiconductor regions (N-type impurityregions 12 a and 22) electrically connected to drain electrode 24 towardN-type impurity region 12 b because diffusion depth D4 of N-typeimpurity region 22 is smaller than diffusion depth D3 of N-type impurityregion 12 a. Therefore, this embodiment can reduce the footprint of theN-type semiconductor region electrically connected to drain electrode24, and can further reduce the footprint of the semiconductor device.

Seventh Embodiment

Referring to FIG. 11, the semiconductor device of this embodimentdiffers from the semiconductor device of the first embodiment shown inFIG. 3 in that an insulating film 34 isolating N-type impurity regions12 a and 12 b from each other is formed in semiconductor substrate SUBin place of electrode 27 and insulating film 28 (FIG. 3). Insulatingfilm 34 extends downward from the surface of semiconductor substrateSUB, and reaches P-type semiconductor region 10 located under N-typeimpurity regions 12 a and 12 b.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the first embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

In the semiconductor device of the embodiment, insulating film 34isolates N-type impurity regions 12 a and 12 b from each other.Therefore, when the punch through breakdown occurs between N-typeimpurity regions 12 a and 12 b, the depletion layer at the boundarybetween N-type impurity region 12 a and P-type semiconductor region 10must extend around the power end of insulating film 34 to N-typeimpurity region 12 b as indicated by an arrow C in FIG. 12. Thus,distance D1 defining the punch through voltage becomes equal to a sum(D5+D6) of a distance D5 from the lower end of N-type impurity region 12a to the lower end of insulating film 34 and a distance D6 from thelower end of N-type impurity region 12 b to the lower end of insulatingfilm 34. Thereby, it is possible to reduce the distance between N-typeimpurity regions 12 a and 12 b while maintaining the punch throughvoltage between N-type impurity regions 12 a and 12 b, and to reduce theelement footprint while maintaining the characteristics. Consequently,the effect similar to that of the first embodiment can be achieved.

Eighth Embodiment

Referring to FIG. 12, the semiconductor device of this embodimentdiffers from the semiconductor device of the seventh embodiment shown inFIG. 11 in that an embedded electrode 35 is formed. Embedded electrode35 is embedded in insulating film 34, and is electrically connected togate electrode 21. Thereby, embedded electrode 35 is isolated fromN-type impurity regions 12 a and 12 b. Embedded electrode 35 preferablyextends downward in FIG. 12 beyond the boundary between P-typesemiconductor region 10 and N-type impurity region 12 a.

The structures of the semiconductor device of this embodiment other thanthe above are substantially the same as those of the semiconductordevice of the seventh embodiment. Therefore, the same members bear thesame reference numbers, and description thereof is not repeated.

The semiconductor device of this embodiment can achieve substantiallythe same effect as that of the seventh embodiment. Further, when theIGBT is off, the potential of embedded electrode 35 is equal to gatepotential Vg2, and is at the voltage level intermediate between emitterpotential Ve and collector potential Vc. When embedded electrode 35having the above potential applies the electric field into semiconductorsubstrate SUB, the extension of the depletion layer at the boundarybetween N-type impurity region 12 a and P-type semiconductor region 10is suppressed within semiconductor substrate SUB. Consequently, thepunch through voltage between N-type impurity regions 12 a and 12 b canbe improved.

The structures in the first to eighth embodiments already described canbe appropriately combined together. More specifically, electrode 27 andinsulating film 28 in the semiconductor device shown in FIG. 3 may beadded to the structures of the semiconductor devices shown in FIGS. 6 to10.

In general, the invention can be applied to the semiconductor deviceperforming the power switching, and thereby can implement thesemiconductor device that performs the fast switching operation withgood breakdown characteristics, operates with the low on-state voltageand requires the small footprint. The semiconductor device may be asingle discrete transistor, and may also be incorporated in anintegrated circuit device such as a module.

Although the present invention has been described and illustrated indetail, it is clearly understood that the same is by way of illustrationand example only and is not to be taken by way of limitation, the scopeof the present invention being interpreted by the terms of the appendedclaims.

1. A semiconductor device, comprising: a semiconductor substrate; afirst semiconductor region of a first conductivity type formed in saidsemiconductor substrate; an MOS transistor of the first conductivitytype formed at a surface of said semiconductor substrate, said MOStransistor of the first conductivity type including a gate electrode, asource electrode, a drain electrode, a second semiconductor region of asecond conductivity type having a channel formed by a potentialdifference between said gate electrode and said source electrode, formedin said first semiconductor region and electrically connected to saiddrain electrode, a third semiconductor region of the first conductivitytype formed in said second semiconductor region and electricallyconnected to said source electrode, and a fourth semiconductor region ofthe first conductivity type formed in said second semiconductor regionand electrically connected to said drain electrode; a fifthsemiconductor region of the second conductivity type formed in saidfirst semiconductor region, opposed to said second semiconductor regionwith said first semiconductor region therebetween and electricallyconnected to said gate electrode; and an electrode formed on said firstsemiconductor region located between said second and fifth semiconductorregions with an insulating film therebetween, and electrically connectedto said gate electrode.
 2. The semiconductor device according to claim1, further comprising: a bipolar transistor including a first conductivenode electrically connected to said source electrode of said MOStransistor of the first conductivity type, a second conductive nodeconnected to said second electrode node and a base node electricallyconnected to said drain electrode of said MOS transistor of the firstconductivity type; an MOS transistor of the second conductivity typeconnected between said second electrode node and said base node of saidbipolar transistor, and being selectively turned on according to acontrol signal to connect electrically said second electrode node tosaid base node of said bipolar transistor; and a PN junction diodehaving a cathode electrically connected to a gate electrode of said MOStransistor of the second conductivity type and an anode electricallyconnected to said second electrode node.
 3. A semiconductor device,comprising: a semiconductor substrate; a first semiconductor region of afirst conductivity type formed in said semiconductor substrate; an MOStransistor of the first conductivity type formed at a surface of saidsemiconductor substrate, said MOS transistor of the first conductivitytype including a gate electrode, a source electrode, a drain electrode,a second semiconductor region of a second conductivity type having achannel formed by a potential difference between said gate electrode andsaid source electrode, formed in said first semiconductor region andelectrically connected to said drain electrode, a third semiconductorregion of the first conductivity type formed in said secondsemiconductor region and electrically connected to said sourceelectrode, and a fourth semiconductor region of the first conductivitytype formed in said second semiconductor region and electricallyconnected to said drain electrode; and a fifth semiconductor region ofthe second conductivity type formed in said first semiconductor region,opposed to said second semiconductor region with said firstsemiconductor region therebetween and electrically connected to saidgate electrode, wherein said first semiconductor region includes aheavily doped region formed at said semiconductor substrate surfacelocated between said second and fifth semiconductor regions, and alightly doped region containing impurities of the first conductivitytype at a lower concentration than said heavily doped region.
 4. Thesemiconductor device according to claim 3, further comprising: a bipolartransistor including a first conductive node electrically connected tosaid source electrode of said MOS transistor of the first conductivitytype, a second conductive node connected to said second electrode nodeand a base node electrically connected to said drain electrode of saidMOS transistor of the first conductivity type; an MOS transistor of thesecond conductivity type connected between said second electrode nodeand said base node of said bipolar transistor, and being selectivelyturned on according to a control signal to connect electrically saidsecond electrode node to said base node of said bipolar transistor; anda PN junction diode having a cathode electrically connected to a gateelectrode of said MOS transistor of the second conductivity type and ananode electrically connected to said second electrode node.
 5. Asemiconductor device, comprising: a semiconductor substrate; a firstsemiconductor region of a first conductivity type formed in saidsemiconductor substrate; an MOS transistor of the first conductivitytype formed at a surface of said semiconductor substrate, said MOStransistor of the first conductivity type including a gate electrode, asource electrode, a drain electrode, a second semiconductor region of asecond conductivity type having a channel formed by a potentialdifference between said gate electrode and said source electrode, formedin said first semiconductor region and electrically connected to saiddrain electrode, a third semiconductor region of the first conductivitytype formed in said second semiconductor region and electricallyconnected to said source electrode, and a fourth semiconductor region ofthe first conductivity type formed in said second semiconductor regionand electrically connected to said drain electrode; and a fifthsemiconductor region of the second conductivity type formed in saidfirst semiconductor region, opposed to said second semiconductor regionwith said first semiconductor region therebetween and electricallyconnected to said gate electrode, wherein each of said second and fifthsemiconductor regions is formed by implanting the impurities, and adiffusion depth of said fifth semiconductor region is smaller than adiffusion depth of said second semiconductor region.
 6. Thesemiconductor device according to claim 5, wherein said firstsemiconductor region includes a heavily doped region formed at saidsemiconductor substrate surface located between said second and fifthsemiconductor regions, and a lightly doped region containing impuritiesof the first conductivity type at a lower concentration than saidheavily doped region.
 7. The semiconductor device according to claim 5,wherein said second semiconductor region has a deep region and a shallowregion having a diffusion depth smaller than a diffusion depth of saiddeep region and being opposed to said fifth semiconductor region, andthe diffusion depth of said fifth semiconductor region is smaller thanthe diffusion depth of said deep region.
 8. The semiconductor deviceaccording to claim 7, wherein each of said shallow region and said fifthimpurity region has a higher impurity concentration than said deepregion.
 9. The semiconductor device according to claim 5, furthercomprising: a bipolar transistor including a first conductive nodeelectrically connected to said source electrode of said MOS transistorof the first conductivity type, a second conductive node connected tosaid second electrode node and a base node electrically connected tosaid drain electrode of said MOS transistor of the first conductivitytype; an MOS transistor of the second conductivity type connectedbetween said second electrode node and said base node of said bipolartransistor, and being selectively turned on according to a controlsignal to connect electrically said second electrode node to said basenode of said bipolar transistor; and a PN junction diode having acathode electrically connected to a gate electrode of said MOStransistor of the second conductivity type and an anode electricallyconnected to said second electrode node.
 10. A semiconductor device,comprising: a semiconductor substrate; a first semiconductor region of afirst conductivity type formed in said semiconductor substrate; an MOStransistor of the first conductivity type formed at a surface of saidsemiconductor substrate, said MOS transistor of the first conductivitytype including a gate electrode, a source electrode, a drain electrode,a second semiconductor region of a second conductivity type having achannel formed by a potential difference between said gate electrode andsaid source electrode, formed in said first semiconductor region andelectrically connected to said drain electrode, a third semiconductorregion of the first conductivity type formed in said secondsemiconductor region and electrically connected to said sourceelectrode, and a fourth semiconductor region of the first conductivitytype formed in said second semiconductor region and electricallyconnected to said drain electrode; a fifth semiconductor region of thesecond conductivity type formed in said semiconductor substrate andelectrically connected to said gate electrode; and an insulating filmformed in said first semiconductor region and isolating said second andfifth semiconductor regions from each other.
 11. The semiconductordevice according to claim 10, further comprising: an embedded electrodeembedded in said insulating film and electrically connected to said gateelectrode.
 12. The semiconductor device according to claim 10, furthercomprising: a bipolar transistor including a first conductive nodeelectrically connected to said source electrode of said MOS transistorof the first conductivity type, a second conductive node connected tosaid second electrode node and a base node electrically connected tosaid drain electrode of said MOS transistor of the first conductivitytype; an MOS transistor of the second conductivity type connectedbetween said second electrode node and said base node of said bipolartransistor, and being selectively turned on according to a controlsignal to connect electrically said second electrode node to said basenode of said bipolar transistor, and a PN junction diode having acathode electrically connected to a gate electrode of said MOStransistor of the second conductivity type and an anode electricallyconnected to said second electrode node.